Daniel J. C. Herr
Identifiers
- Open LibraryOL6861889A
Top Subjects
- Molecular electronics (1)
- Congresses (1)
- Electron beam Lithography (1)
- Industrial applications (1)
- Microlithography (1)
- Masks (Electronics) (1)
- Extreme ultraviolet lithography (1)
Books by Daniel J. C. Herr
Total count: 5
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NanoelectronicsElsevier Science & Technology Books2004-01-01
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Alternative lithographic technologies II23-25 February 2010, San Jose, California, United StatesSPIE2010-01-01
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Alternative lithographic technologies III1-3 March 2011, San Jose, California, United StatesSPIE2011-01-01
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Nanoscience and NanoengineeringAdvances and ApplicationsTaylor & Francis Group2014-01-01
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Directed Self-Assembly for NanopatterningNovember 30-December 5, 2014, Boston, Massachusetts, USACambridge University Press2015-01-01