Pvd for Microelectronics
Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)
1st edition
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Word Count
104,750 words, Guess
Page Count
419 pages
Physical Format
Hardcover
Identifiers
- Open LibraryOL9823170M
- ISBN-139780125330268
- ISBN-10012533026X
- OCLC Control Number39275876
- Internet Archivepvdformicroelect00powe
and 3 more
- Library of Congress Control Number98028495
- LibraryThing8249951
- Goodreads1767002
Classifications
- LCCTK7872.T55P68 1998
First Sentence
The physical process tat we now call sputtering was first reported in 1852 by Sir William Robert Grove [1.1], who described the effect as "cathodic disintegration."
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