Laser processing of thin films and microstructures
oxidation, deposition, and etching of insulators
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Word Count
80,000 words, Guess
Page Count
320 pages
Identifiers
- Open LibraryOL2391279M
- ISBN-100387179518
- OCLC Control Number16404257
- Library of Congress Control Number87020660
- Goodreads4477292
Classifications
- DDC621.36/6
- LCCTA1677 .B69 1987
Subjects
Series Statement
- Springer series in materials science ;
Other Editions
- Laser processing of thin films and microstructures: oxidation, deposition, and etching of insulators
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