Contributions

  • Claire Dupas (Editor) - Contributor
  • Philippe Houdy (Editor) - Contributor
  • Marcel Lahmani (Editor) - Contributor

Publication

2006-10-09 - Springer

Language

English

Word Count

205,750 words, Guess

Page Count

823 pages

Physical Format

Hardcover

Identifiers

and 2 more
  • Library of Congress Control Number2006929446
  • Goodreads663686

Classifications

  • LCCT174.7 .N358513 2007

First Sentence

Lithography is the process of printing patterns onto a thin film called a resist, using a localised interaction between tins layer and an engraving micro-tool or particle beam.

Subjects

Other Editions

  • Nanoscience: Nanotechnologies and NanophysicsHardcoverSpringer2006-10-09

Reader Reviews

No reviews yet for this book.

Be the first to share your thoughts!