Multi-Wafer Rotating MEMS Machines
Turbines, Generators, and Engines
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Identifiers
- ISBN-139780387777474
- ISBN-100387777474
- Better World Books9780387777474
- Open LibraryOL37113295M
Classifications
- LCCTK7800-8360
Subjects
Other Editions
- Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
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