Fundamentals of Microfabrication
The Science of Miniaturization, Second Edition
2 edition
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Word Count
188,000 words, Guess
Page Count
752 pages
Physical Format
Hardcover
Identifiers
- ISBN-100849308267
- ISBN-139780849308260
- LibraryThing975523
- Open LibraryOL8258754M
Subjects
Topics
LasersMachiningTechnologyMicroelectronicsLaser TechnologyIntegrated circuitsScience/MathematicsDesign and constructionEngineering - MechanicalTechnology & Industrial ArtsElectronics - MicroelectronicsMicroelectromechanical systemsElectronic devices & materialsEngineering - Electrical & ElectronicTechnology / Electronics / Microelectronics
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