Nanolithography: A Borderland between STM, EB, IB, and X-Ray Lithographies (NATO Science Series E:)
1 edition
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Contributions
- M. Gentili (Editor) - Contributor
- Carlo Giovannella (Editor) - Contributor
- Stefano Selci (Editor) - Contributor
Publication
1994-04-30 - Springer
Language
English
Word Count
57,000 words, Guess
Page Count
228 pages
Physical Format
Hardcover
Identifiers
- ISBN-100792327942
- ISBN-139780792327943
- Goodreads4384781
- Open LibraryOL7807464M
Subjects
Topics
SciencePhysicsCongressesNanotechnologyNanolithographyMaterial ScienceMicrolithographyScience / PhysicsIntegrated circuitsScience/MathematicsMolecular electronicsDesign and constructionTechnology & Industrial ArtsElectronics - Circuits - PrintedElectronic Engineering (Specific Aspects)Condensed matter physics (liquids & solids)
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