Chemical Vapor Deposition for Microelectronics
Principles, Technology, and Applications (Materials Science and Process Technology)
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Word Count
53,750 words, Guess
Page Count
215 pages
Physical Format
Hardcover
Identifiers
- Internet Archivechemicalvapordep00sher
- ISBN-100815511361
- ISBN-139780815511366
- Goodreads3583498
- Open LibraryOL8048738M
First Sentence
Chemical vapor deposition (CVD) is a process where one or more gaseous species react on a solid surface and one of the reaction products is a solid phase material.
Subjects
Topics
Other Editions
- Chemical Vapor Deposition for Microelectronics
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