Plasma electronics
applications in microelectronic device fabrication
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Author
Publication
2005 - Taylor&Francis, Boca Raton, FL, Florida
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- Internet Archiveplasmaelectronic00maka
- ISBN-100750309768
- ISBN-139780750309769
- Goodreads186205
- Library of Congress Control Number2005056888
and 4 more
- OCLC Control Number73514813
- OCLC Control Number62290646
- Better World Books9780750309769
- Open LibraryOL3431284M
Classifications
- DDC621.044
- LCCTA2020 .M35 2005
- LCCTA2020 .M35 2006
and 1 more
- LCCTA2020.M35 2006
Subjects
Series Statement
- Series in plasma physics
Other Editions
- Plasma electronics: applications in microelectronic device fabrication
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