Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
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Author
Contributions
- Langley Research Center. - Contributor
Publication
1997 - National Aeronautics and Space Administration, Langley Research Center, Hampton, Va, Virginia
Language
English
Word Count
23,250 words, Guess
Page Count
93 pages
Physical Format
Microform
Identifiers
- OCLC Control Number40386301
- Open LibraryOL17593512M
Subjects
Topics
Other Editions
- Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon
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