Microstereolithography and other Fabrication Techniques for 3D MEMS
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Word Count
68,500 words, Guess
Page Count
274 pages
Identifiers
- ISBN-10047152185X
- ISBN-139780471521853
- Goodreads4688811
- Library of Congress Control Number00069344
- Better World Books9780471521853
and 1 more
- Open LibraryOL7618578M
Classifications
- LCCTK7875.V37 2001
First Sentence
Microelectromechanical systems (MEMS) refer to a collection of microseconds and actuators that can sense its environment and have the ability to react to changes in that environment with the use of a microcircuit control.
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