Publication

2013 - Springer London, Limited

Language

English

Word Count

68,250 words, Guess

Page Count

273 pages

Identifiers

  • ISBN-139781461480549
  • ISBN-10146148054X
  • Better World Books9781461480549
  • Open LibraryOL35499798M

Classifications

  • LCCQD1-999

Subjects

Other Editions

  • Atomic Layer Deposition for SemiconductorsSpringer London, Limited2013

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