Optical micro- and nanometrology in microsystems technology II
8-10 April 2008, Strasbourg, France
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Author
Contributions
- SPIE Europe - Contributor
- Alsace international - Contributor
- Association française des industries de l'optique et de la photonique - Contributor
- Society of Photo-optical Instrumentation Engineers - Contributor
Publication
2008 - SPIE, Bellingham, Wash, Washington (State)
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- ISBN-100819471933
- ISBN-139780819471932
- Library of Congress Control Number2010459262
- OCLC Control Number233830859
- Better World Books9780819471932
and 1 more
- Open LibraryOL24545099M
Classifications
- LCCQC367 .O5892 2008
- LCCQC367.O5892 2008
Series Statement
- Proceedings of SPIE -- v. 6995
- Proceedings of SPIE--the International Society for Optical Engineering -- v. 6995.
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