A. R. Heyd

Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry

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Author

A. R. Heyd

Contributions

Alterovitz, S. A. - Contributor
Croke, E. T. - Contributor
United States. National Aeronautics and Space Administration. - Contributor

Publication

1995 - National Technical Information Service, distributor, [Washington, D.C, District of Columbia

Language

English

Word Count

0 words, Guess

Page Count

0 pages

Physical Format

Microform

Identifiers

Open LibraryOL15501911M

Subjects

Topics

Germanium Algorithms Substrates Dielectrics Ellipsometry Silicon compounds

Series Statement

NASA-TM -- 112114.
NASA technical memorandum -- 112114.

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