Reactive sputtering applied to microelectronic devices
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Author
Contributions
- Uppsala universitet - Contributor
Publication
1988 - Uppsala Universitet, Uppsala, Sweden
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- OCLC Control Number19475482
- ISBN-109155422160
- Open LibraryOL53825934M
Subjects
Series Statement
- Acta Universitatis Upsaliensis -- 143
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