Atomic layer deposition
principles, characteristics, and nanotechnology applications
2nd Edition
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Author
Contributions
- Cameron, David, 1949- - Contributor
- Kääriäinen, Marja-Leena - Contributor
- Sherman, Arthur, 1931- - Contributor
Publication
2013 - Scrivener Publishing, Beverly, MA, Massachusetts
Language
English
Word Count
63,250 words, Guess
Page Count
253 pages
Identifiers
- ISBN-101118062779
- ISBN-139781118062777
- Library of Congress Control Number2013016209
- Library of Congress Control Number2013016681
- Better World Books9781118062777
and 1 more
- Open LibraryOL31141317M
Classifications
- DDC620/.5
- LCCTS695 .K33 2013
- LCCTS695
Subjects
Topics
Other Editions
- Atomic layer deposition
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