CVD of compound semiconductors
precursor synthesis, development and applications
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Author
Contributions
- O'Brien, Paul, Ph.D. - Contributor
Publication
1997 - VCH, Weinheim, Germany, England
Language
English
Subjects
Topics
MaterialsVapor-platingSemiconductorsDesign and constructionCompound semiconductorsChemical vapor depositionChemical vapor deposition.Compound semiconductors -- Design and construction.
Other Editions
- CVD of compound semiconductors: precursor synthesis, development and applications
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