Etching in microsystem technology
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Word Count
92,000 words, Guess
Page Count
368 pages
Identifiers
- Open LibraryOL112876M
- ISBN-103527295615
- OCLC Control Number40684553
- OCLC Control Numberetchingmicrosyst00kohl
- Library of Congress Control Number99233639
and 1 more
- Goodreads1149107
Classifications
- DDC621.3815/31
- LCCTK7872.M3 K64 1999
Subjects
Topics
Plasma etchingPlasma etching.MicrolithographyMicrolithography.Masks (Electronics)Computer engineeringMicrocomputers, design and construction
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