Contributions

  • Boning, Duane S. - Contributor
  • Materials research Society. Meeting - Contributor
  • Symposium on Chemical-Mechanical Planarization (2003 : San Francisco, Calif.) - Contributor

Publication

2003 - Materials Research Society, Warrendale, Pa, Pennsylvania

Language

English

Word Count

87,000 words, Guess

Page Count

348 pages

Identifiers

and 1 more
  • LibraryThing4669764

Classifications

  • LCCTK7871 .C44 2003

Subjects

Topics

Genres

  • Congresses.

Series Statement

  • Materials Research Society symposium proceedings ;

Other Editions

  • Chemical-mechanical planarization: symposium held April 22-24, 2003, San Francisco, California, U.S.A.Materials Research Society2003-01-01

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