Microlithography
science and technology
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Contributions
- Sheats, James R., 1948- - Contributor
- Smith, Bruce W., 1959- - Contributor
Publication
1998 - Marcel Dekker, New York, New York (State)
Language
English
Word Count
195,000 words, Guess
Page Count
780 pages
Identifiers
- Open LibraryOL356842M
- ISBN-100824799534
- OCLC Control Number38765112
- OCLC Control Numberisbn_9780824799533
- Library of Congress Control Number98016713
and 2 more
- LibraryThing1761388
- Goodreads3836700
Classifications
- DDC621.3815/31
- LCCTK7836 .M525 1998
Subjects
Topics
Other Editions
- Microlithography: science and technology
Show 1 more editions
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