CMOS-MEMS
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Author
Contributions
- Brand, Oliver, 1964- - Contributor
- Fedder, G. K. - Contributor
Publication
2005 - Wiley-VCH, Weinheim
Language
English
Word Count
148,500 words, Guess
Page Count
594 pages
Identifiers
- Open LibraryOL18986809M
- ISBN-103527310800
- OCLC Control Number56806744
- OCLC Control Numbercmosmemsadvanced00balt
- Goodreads868620
and 1 more
- LibraryThing7950376
Classifications
- DDC621.3815
- LCCTK7875 .C667 2005
Description
"In this topical volume, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this field and takes them from fabrication technologies and material characterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution."--Jacket.
Subjects
Topics
Series Statement
- Advanced micro & nanosystems -- v. 2.
Other Editions
- CMOS-MEMS
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