MEMS length and strain measurements using an optical interferometer
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Author
Contributions
- National Institute of Standards and Technology (U.S.) - Contributor
Publication
2001 - U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Gaithersburg, MD, Maryland
Language
English
Word Count
20,250 words, Guess
Page Count
81 pages
Physical Format
Microform
Identifiers
- OCLC Control Number50255496
- Open LibraryOL13630510M
Subjects
Series Statement
- NISTIR -- 6779
Other Editions
- MEMS length and strain measurements using an optical interferometer
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