Chemical vapor deposition polymerization
the growth and properties of parylene thin films
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Author
Contributions
- Lu, T.-M. 1943- - Contributor
Publication
2004 - Kluwer Academic Publishers, Boston, Massachusetts
Language
English
Word Count
25,500 words, Guess
Page Count
102 pages
Identifiers
- ISBN-101402076886
- ISBN-139781402076886
- Goodreads6300124
- Library of Congress Control Number2003065275
- OCLC Control Number53156157
and 2 more
- Better World Books9781402076886
- Open LibraryOL18208699M
Classifications
- LCCTS695 .F67 2004
- LCCQC1-75
Subjects
Topics
Other Editions
- Chemical vapor deposition polymerization
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