Microfabrication and nanomanufacturing
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Author
Contributions
- Jackson, Mark J. - Contributor
Publication
2005 - Taylor & Francis, Boca Raton, FL, Florida
Language
English
Word Count
100,250 words, Guess
Page Count
401 pages
Identifiers
- Open LibraryOL3425706M
- ISBN-100824724313
- OCLC Control Number1239742827
- OCLC Control Number60664422
- OCLC Control Numbermicrofabrication00jack
and 3 more
- Library of Congress Control Number2005049275
- Goodreads4672643
- LibraryThing4718981
Classifications
- DDC620/.5
- LCCTK7836 .M523 2005
Subjects
Topics
IndustrialTECHNOLOGYEngineeringMiniaturizationMicroelectronicsMicroelectronics.NanomanufacturingMicroélectroniqueCircuits intégrésIntegrated circuitsDesign and constructionConception et constructionMicroelectromechanical systemsEnvironmental Engineering & TechnologyIntegrated circuits -- Design and construction.Microelectromechanical systems -- Design and construction.
Other Editions
- Microfabrication and nanomanufacturing
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