Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon
low cost silicon array project.
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Author
Contributions
- Breneman, W. C. - Contributor
- Farrier, E. G. - Contributor
- Morihara, Hiroshi. - Contributor
- United States. Dept. of Energy. - Contributor
Publication
1979 - Dept. of Energy, Washington, District of Columbia
Language
English
Subjects
Topics
Series Statement
- DOE/JPL ; 954334-8
Other Editions
- Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon: low cost silicon array project.
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