Chemical-Mechanical Planarization--Integration, Technology and Reliability
Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
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Word Count
75,500 words, Guess
Page Count
302 pages
Physical Format
Hardcover
Identifiers
- Open LibraryOL12092043M
- ISBN-139781558998209
- ISBN-101558998209
- OCLC Control Number61263882
- Library of Congress Control Number2005285362
and 2 more
- Goodreads7164099
- LibraryThing4669768
Classifications
- LCCTK7871 .C465 2005
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