Ion implantation
basics to device fabrication
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Author
Publication
1995 - Kluwer Academic Publishers, Boston, Massachusetts
Language
English
Word Count
98,250 words, Guess
Page Count
393 pages
Identifiers
- Open LibraryOL1108898M
- ISBN-100792395204
- OCLC Control Number31171598
- OCLC Control Numberionimplantationb0000rimi
- Library of Congress Control Number94034251
and 1 more
- Goodreads3828757
Classifications
- DDC621.3815/2
- LCCQC702.7.I55 R56 1995
Subjects
Series Statement
- The Kluwer international series in engineering and computer science ;
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