Rapid thermal processing
science and technology
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Author
Contributions
- Fair, Richard B. - Contributor
Publication
1993 - Academic Press, Boston, Massachusetts
Language
English
Word Count
107,500 words, Guess
Page Count
430 pages
Identifiers
- Open LibraryOL1399222M
- ISBN-100122476905
- OCLC Control Number27432101
- Library of Congress Control Number93006882
- Goodreads3646616
Classifications
- DDC621.3815/2
- LCCTK7871.85 .F299 1993
Subjects
Topics
SemiconductorsHeat treatmentThermodynamicsSemiconductor dopingSemiconductor doping.Rapid thermal processingRapid thermal processing.Semiconductors -- Heat treatment.
Other Editions
- Rapid thermal processing: science and technology
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