Epitaxy
Physical Principles and Technical Implementation
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Author
Contributions
- Richter, Wolfgang - Contributor
- Sitter, Helmut - Contributor
Publication
2004 - Springer Berlin Heidelberg, Berlin, Heidelberg, Germany
Language
English
Word Count
131,250 words, Guess
Page Count
525 pages
Physical Format
Electronic resource
Identifiers
- Internet Archiveepitaxyphysicalp00herm
- ISBN-10364208737X
- ISBN-103662070642
- ISBN-139783642087370
- ISBN-139783662070642
and 4 more
- OCLC Control Number851377980
- Better World Books9783642087370
- Better World Books9783662070642
- Open LibraryOL27036831M
Classifications
- DDC548
- LCCQD901-999
Description
Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy's coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization. It is intended for undergraduate students, PhD students, research scientists, lecturers and practicing engineers interested in materials science, solid state electronics and crystal growth.
Subjects
Series Statement
- Springer Series in MATERIALS SCIENCE -- 62
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