Advances in Resist Technology and Processing XV
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Author
Publication
1998 - SPIE-International Society for Optical Engine
Language
English
Word Count
375,000 words, Guess
Page Count
1,500 pages
Physical Format
Hardcover
Identifiers
- Open LibraryOL11393073M
- ISBN-139780819427786
- ISBN-100819427780
- OCLC Control Number39634674
Classifications
- LCC
Alternate Titles
- Advances in Resist Technology & Processing XV
Subjects
Other Editions
- Advances in Resist Technology and Processing XV
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