Technologien für Mikrosysteme
Stand und Entwicklung : integrierte Optik, Schichttechniken, Mikromechanik, Halbleitertechniken, Faseroptik
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Author
Contributions
- Gronau, Magdala. - Contributor
- Hafkesbrink, Joachim. - Contributor
Publication
1993 - VDI Verlag, Düsseldorf, Germany
Language
German
Word Count
55,250 words, Guess
Page Count
221 pages
Identifiers
- ISBN-103184013219
- ISBN-139783184013219
- Library of Congress Control Number94238634
- Open LibraryOL1235473M
Classifications
- DDC338.4/762138154
- LCCTK7870 .T442 1993
Subjects
Other Editions
- Technologien für Mikrosysteme: Stand und Entwicklung : integrierte Optik, Schichttechniken, Mikromechanik, Halbleitertechniken, Faseroptik
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