MEMS components and applications for industry, automobiles, aerospace, and communication II
28-29 January 2003, San Jose, California, USA
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Author
Contributions
- Janson, Siegfried W. - Contributor
- Society of Photo-optical Instrumentation Engineers. - Contributor
- Semiconductor Equipment and Materials International. - Contributor
- Solid State Technology (Organization) - Contributor
- Sandia National Laboratories. - Contributor
Publication
2003 - SPIE, Bellingham, Wash., USA, Washington (State)
Language
English
Word Count
62,000 words, Guess
Page Count
248 pages
Identifiers
- Internet Archivememscomponentsap4981unse
- ISBN-100819447811
- ISBN-139780819447814
- Library of Congress Control Number2003544705
- OCLC Control Number51894925
and 2 more
- Better World Books9780819447814
- Open LibraryOL3778038M
Classifications
- LCCTK7875 .M453 2003
- LCCTK7875.M453 2003
- LCCTR:TA
Subjects
Topics
CongressesIndustrial applicationsDesign and constructionManufacturing processesMicroelectromechanical systemsManufacturing processes -- CongressesMicroelectromechanical systems -- Design and construction -- CongressesMicroelectromechanical systems -- Industrial applications -- Congresses
Genres
- Congresses
Series Statement
- SPIE proceedings series,
- v. 4981
- Proceedings of SPIE--the International Society for Optical Engineering ;
Other Editions
- MEMS components and applications for industry, automobiles, aerospace, and communication II: 28-29 January 2003, San Jose, California, USA
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