Ion implantation in microelectronics
a comprehensive bibliography
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Word Count
63,750 words, Guess
Page Count
255 pages
Identifiers
- ISBN-10030665198X
- ISBN-139780306651984
- Goodreads5402363
- Library of Congress Control Number81010753
- OCLC Control Number7615188
and 1 more
- Open LibraryOL4264858M
Classifications
- DDC016.621381/71
- LCCZ5838.S4 A38
- LCCTK7871.85 A38
Subjects
Topics
DiffusionBibliographyIon implantationSemiconductor dopingIon implantation -- BibliographySemiconductor doping -- Bibliography
Series Statement
- Computer science information guides ;
- v. 1
Other Editions
- Ion implantation in microelectronics
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