Impurity diffusion and gettering in silicon
symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
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Author
Contributions
- Fair, Richard B. - Contributor
- Pearce, Charles W. - Contributor
- Washburn, Jack, 1921- - Contributor
- Materials Research Society. Meeting - Contributor
- Symposium on Impurity Diffusion and Gettering in Semiconductors (1984 : Boston, Mass.) - Contributor
Publication
1985 - Materials Research Society, Pittsburgh, Pa, Pennsylvania
Language
English
Word Count
71,000 words, Guess
Page Count
284 pages
Identifiers
- Open LibraryOL3026804M
- ISBN-100931837014
- OCLC Control Number11971128
- Library of Congress Control Number85007226
- LibraryThing4270895
Classifications
- DDC621.3815/2
- LCCTK7871.85 .I47 1985
Subjects
Topics
Series Statement
- Materials Research Society symposia proceedings,
Other Editions
- Impurity diffusion and gettering in silicon: symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
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