Chemical mechanical polishing in silicon processing
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Contributions
- Li, Shin Hwa. - Contributor
- Miller, Robert O., 1947- - Contributor
Publication
2000 - Academic Press, San Diego, CA, California
Language
English
Word Count
76,750 words, Guess
Page Count
307 pages
Identifiers
- ISBN-100127521720
- ISBN-139780127521725
- Goodreads3372115
- LibraryThing4669750
- OCLC Control Number42707637
and 2 more
- Better World Books9780127521725
- Open LibraryOL15468487M
Subjects
Series Statement
- Semiconductors and semimetals -- v. 63
Other Editions
- Chemical mechanical polishing in silicon processing
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