Publication

1990 - Noyes Publications

Language

English

Word Count

130,750 words, Guess

Page Count

523 pages

Physical Format

Hardcover

Identifiers

First Sentence

The driving force for the rapid development of plasma based processing over the past 15 years has been the microelectronics industry and in particular, the fabrication of silicon integrated circuits.

Subjects

Other Editions

  • Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology)HardcoverNoyes Publications1990-01-01

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