Advances in resist technology and processing IV
2-3 March 1987, Santa Clara, California
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Author
Contributions
- Bowden, M. J., 1943- - Contributor
- Society of Photo-optical Instrumentation Engineers. - Contributor
Publication
1987 - SPIE--the International Society for Optical Engineering, Bellingham, Wash., USA, Washington (State)
Language
English
Word Count
91,750 words, Guess
Page Count
367 pages
Identifiers
- ISBN-100892528060
- ISBN-139780892528066
- Goodreads5912931
- Open LibraryOL17918342M
Subjects
Series Statement
- Proceedings of SPIE--the International Society for Optical Engineering -- v. 771.
Other Editions
- Advances in resist technology and processing IV: 2-3 March 1987, Santa Clara, California
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