Atomic layer deposition for nanotechnology
an enabling process for nanotechnology fabrication
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Author
Publication
2008 - Ivoryton Press, Ivoryton, Conn, Connecticut
Language
English
Word Count
59,750 words, Guess
Page Count
239 pages
Identifiers
- ISBN-139780981466347
- ISBN-100981466346
- Library of Congress Control Number2008900091
- OCLC Control Number236117849
- Open LibraryOL17020717M
Classifications
- LCCTS695 .S5385 2008
Subjects
Topics
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