Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
22-24 January 2007, San Jose, California, USA
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Publication
2007 - SPIE
Language
English
Word Count
92,500 words, Guess
Page Count
370 pages
Identifiers
- ISBN-139780819465757
- ISBN-100819465755
- Library of Congress Control Number2007297951
- Better World Books9780819465757
- Open LibraryOL28453031M
Classifications
- LCCTJ1191.5.M55248 2007
- LCCTJ1191.5 .M55248 2007
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