Introduction to VLSI process engineering
English language ed.
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Author
Contributions
- Naka, Yuji, 1945- - Contributor
- Kagaku Kōgaku Kyōkai (Japan) - Contributor
Publication
1993 - Chapman & Hall, London, England
Language
English
Word Count
52,500 words, Guess
Page Count
210 pages
Identifiers
- Open LibraryOL1740013M
- ISBN-100412395509
- OCLC Control Number27434850
- OCLC Control Numberintroductiontovl00naka
- Library of Congress Control Number92045674
and 1 more
- Goodreads4950820
Classifications
- DDC621.39/5
- LCCTK7874 .I5957 1993
Subjects
Other Editions
- Introduction to VLSI process engineering
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