Epitaxy
Physical Foundation and Technical Implementation
1 edition
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Publication
2004-09-20 - Springer
Language
English
Word Count
130,500 words, Guess
Page Count
522 pages
Physical Format
Hardcover
Identifiers
- Open LibraryOL9063444M
- ISBN-139783540678212
- ISBN-103540678212
- OCLC Control Number52813838
- OCLC Control Numberepitaxyphysicalp0000herm
and 2 more
- Library of Congress Control Number2003059146
- Goodreads1691137
Classifications
- LCCQD921 .H48 2004
Description
"This advanced textbook describes all important aspects of th epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy's coverage of science and technology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization. It is intended for undergraduate students, PhD students, research scientists, lecturers and practicing engineers interested in materials science, solid state electronics and crystal growth."--Jacket.
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