Thin Film Processes, Volume 2
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Author
Contributions
- John L. Vossen (Editor) - Contributor
Publication
1991-04-28 - Academic Press
Language
English
Word Count
222,000 words, Guess
Page Count
888 pages
Physical Format
Hardcover
Identifiers
- ISBN-100127282513
- ISBN-139780127282510
- Open LibraryOL9283989M
First Sentence
The processes selected for review fall into the same four general categories as in the volume [1]: (1) physical methods of film deposition, (2) chemical methods of film deposition, (3) hybrid (i.e., physical-chemical) methods of film deposition, and (4) pattern delineation processes.
Subjects
Other Editions
- Thin Film Processes, Volume 2
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