Plasma-Surface Interactions and Processing of Materials
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Author
Contributions
- Gras-Marti, Alberto - Contributor
- Valles-Abarca, Jose Antonia - Contributor
- Flamm, Daniel L. - Contributor
Publication
1990 - Springer Netherlands, Dordrecht, Netherlands
Language
English
Word Count
144,000 words, Guess
Page Count
576 pages
Physical Format
Electronic resource
Identifiers
- Internet Archiveplasmasurfaceint00rica
- ISBN-109400919468
- ISBN-139789400919464
- OCLC Control Number840304751
- Better World Books9789400919464
and 1 more
- Open LibraryOL27081441M
Classifications
- DDC620.11
- LCCTA404.6
- LCCTP1-1185
Alternate Titles
- Proceedings of the NATO Advanced Study Institute, Alicante, Spain, September 4-16, 1988
Description
An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. <br/> The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. <br/> The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
Subjects
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