Crucial Issues in Semiconductor Materials and Processing Technologies
Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy 1-13 July 1991
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Author
Contributions
- Priolo, F. - Contributor
- Rimini, E. - Contributor
- Poate, J. M. - Contributor
Publication
1992 - Springer Netherlands, Dordrecht, Netherlands
Language
English
Word Count
141,000 words, Guess
Page Count
564 pages
Physical Format
Electronic resource
Identifiers
- Internet Archivecrucialissuessem00kolb
- ISBN-10940112714X
- ISBN-139789401127141
- OCLC Control Number840309570
- Better World Books9789401127141
and 1 more
- Open LibraryOL27028165M
Classifications
- LCCTK7800-8360
Alternate Titles
- Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, July 1-13, 1991
Description
Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion. <br/>
Subjects
Series Statement
- NATO ASI Science, Series E: Applied Sciences, 0168-132X -- 222
- NATO ASI Science, Series E: Applied Sciences -- 222.
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