Advances in metrology for x-ray and EUV optics III
1-2 August 2010, San Diego, California, United States
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Author
Contributions
- SPIE (Society) - Contributor
Publication
2010 - SPIE, Bellingham, Wash, Washington (State)
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- ISBN-100819482978
- ISBN-139780819482976
- Library of Congress Control Number2011377541
- OCLC Control Number694366374
- Open LibraryOL24888481M
Classifications
- LCCQC367 .A3383 2007
Subjects
Series Statement
- Proceedings of SPIE -- 7801.
- Proceedings of SPIE--the International Society for Optical Engineering -- v. 7801.
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