Ion implantation, sputtering and their applications
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Author
Contributions
- Kelly, J. C. joint author. - Contributor
- Hartley, N. E. W., joint author. - Contributor
Publication
1976 - Academic Press, London, England
Language
English
Word Count
83,250 words, Guess
Page Count
333 pages
Identifiers
- Open LibraryOL5224354M
- ISBN-100126969507
- OCLC Control Number2400851
- OCLC Control Numberionimplantations00town
- Library of Congress Control Number75196983
and 1 more
- Goodreads3790593
Classifications
- DDC530.4/1
- LCCQC702.7.I55 T67
Subjects
Topics
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