Integration of resonant force sensors into a passive microgripper for robotic based three-dimensional microassembly: Design and modelling.

Description

This thesis addresses the analytical and simulation models of a novel integration of a double-ended tuning fork (DETF) resonant force sensor into a compliant, passive microgripper. The resonant sensor provides real-time force feedback for microassembly automation applications. The main contribution of this research is the design of a force sensor that reduces the coefficient of friction and fabrication process uncertainties. Furthermore, a passive temperature compensation procedure is proposed to minimize the force sensor temperature drift and, thus, the force measurement errors. The force sensor design permits a force sensitivity of 1500 Hz/muN, dynamic range of 4.0 x 105, and resolution of 0.03 muN with sensor bandwidth of 5000 Hz. The second main contribution of this thesis is the development of a new parasitic capacitance current cancellation method in order to provide inherent robustness against parasitic current which interface with measurements. Finally, the superior results obtained from Modelling prove the feasibility of the resonant force sensor in microgripping applications.

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