Plasma processing for VLSI
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Author
Contributions
- Einspruch, Norman G. - Contributor
- Brown, Dale M. - Contributor
Publication
1984 - Academic Press, New York, New York (State)
Language
English
Word Count
131,750 words, Guess
Page Count
527 pages
Identifiers
- Internet Archivevlsielectronicsm08eins
- ISBN-100122341082
- ISBN-139780122341083
- Goodreads3756366
- LibraryThing1452712
and 2 more
- Library of Congress Control Number83022351
- Open LibraryOL3179753M
Classifications
- DDC621.381/73
- LCCTK7874 .V56 vol. 8
Subjects
Topics
Integrated circuitsPlasma (Ionized gases)Industrial applicationsVery large scale integrationPlasma (Ionized gases) -- Industrial applicationsIntegrated circuits -- Very large scale integration
Series Statement
- VLSI electronics ;
- v. 8
Other Editions
- Plasma processing for VLSI
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