Contributions

  • Einspruch, Norman G. - Contributor
  • Brown, Dale M. - Contributor

Publication

1984 - Academic Press, New York, New York (State)

Language

English

Word Count

131,750 words, Guess

Page Count

527 pages

Identifiers

  • Internet Archivevlsielectronicsm08eins
  • ISBN-100122341082
  • ISBN-139780122341083
  • Goodreads3756366
  • LibraryThing1452712
and 2 more

Classifications

  • DDC621.381/73
  • LCCTK7874 .V56 vol. 8

Subjects

Series Statement

  • VLSI electronics ;
  • v. 8

Other Editions

  • Plasma processing for VLSIAcademic Press1984-01-01

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