IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems
proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany
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Author
Contributions
- American Society of Mechanical Engineers. Dynamic Systems and Control Division. - Contributor
- Baden-Württemberg (Germany). Wirtschaftsministerium. - Contributor
- IEEE Robotics and Automation Society. - Contributor
Publication
1998 - Institute of Electrical and Electronics Engineers, [New York, N.Y.], New York (State)
Language
English
Word Count
166,500 words, Guess
Page Count
666 pages
Identifiers
- Open LibraryOL21348631M
- ISBN-10078034412X
- OCLC Control Number40135525
- Library of Congress Control Number98179821
- Goodreads4021954
Classifications
- LCCTK153 .M468 1998
Alternate Titles
- 1998 IEEE Micro Electro Mechanical Systems
- Eleventh Annual International Workshop on Micro Electro Mechanical Systems
- 11th Annual International Workshop on Micro Electro Mechanical Systems
- Investigation of micro structures, sensors, actuators, machines and systems
- Micro Electro Mechanical Systems
- MEMS 98
Subjects
Topics
Other Editions
- IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems: proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany
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