William Man-Wai Tong, Douglas J. Resnick

Alternative lithographic technologies IV

13-16 February 2012, San Jose, California, United States

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Author

Contributions

SPIE (Society) - Contributor

Publication

2012 - SPIE, Bellingham, Washington, Washington (State)

Language

English

Word Count

0 words, Guess

Page Count

0 pages

Identifiers

ISBN-139780819489791
ISBN-100819489794
Library of Congress Control Number2013427479
Open LibraryOL30958467M

Classifications

LCCTK7872.M3 A484 2012

Alternate Titles

Alternative lithographic technologies 4
Alternative lithographic technologies four

Subjects

Topics

Congresses Microlithography Masks (Electronics)Industrial applications Electron beam Lithography Extreme ultraviolet lithography

Series Statement

Proceedings of SPIE -- volume 8323

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